Carbon sputtering yield measurements at
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Robert D. Kolasinski; James E. Polk; Dan Goebel; Lee K. Johnson
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Article
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2008
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Elsevier Science
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English
β 572 KB
In this investigation, carbon sputtering yields were measured experimentally at varying angles of incidence under Xe + bombardment. The measurements were obtained by etching a coated quartz crystal microbalance (QCM) with a low energy ion beam. The material properties of the carbon targets were char