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A new formula for sputtering yield as function of ion energies at normal incidence

✍ Scribed by Kh. I. Grais; A.A. Shaltout; S.S. Ali; R.M. Boutros; K.M. El-behery; Z.A. El-Sayed

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 555 KB
Volume: 405
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2010.01.038

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