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SIMS studies of low-K materials

✍ Scribed by Xue-Feng Lin; Stephen P. Smith

Book ID: 108289438
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 469 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2006.07.076

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