✦ LIBER ✦

SIMS analysis of thermal and ion-beam induced broadening of thin metal markers in silicon

✍ Scribed by D.G. Tonn; O.F. Sankey; I.S.T. Tsong

Book ID: 113277683
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 457 KB
Volume: 15
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(86)90283-1

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