X-ray beam induced current/microprobe x-ray fluorescence: synchrotron radiation based x-ray microprobe techniques for analysis of the recombination activity and chemical nature of metal impurities in silicon

✍ Scribed by Vyvenko, O F; Buonassisi, T; Istratov, A A; Weber, E R

• Book ID: 111869373
• Publisher: Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 217 KB
• Volume: 16
• Category: Article
• ISSN: 0953-8984
• DOI: 10.1088/0953-8984/16/2/017