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Simple model of power deposited into the plasma bulk of rf planar magnetrons

✍ Scribed by Minea, T M; Bretagne, J

Book ID: 121497418
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 154 KB
Volume: 12
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/12/1/313

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