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Simple Method for Determination of the Interface Trap Density at the Midgap in MOS Structures

โœ Scribed by Jakubowski, A. ;Iniewski, K.


Publisher
John Wiley and Sons
Year
1982
Tongue
English
Weight
234 KB
Volume
73
Category
Article
ISSN
0031-8965

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Simple method for accurate determination
โœ A Koukab; A Bath; O Baehr ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 117 KB

A simple method for the determination of the mean interface density D of MIS structures is proposed. The method is itm based on modified bias-thermal stress measurements and combines capacitance-voltage measurements with doping profile determination. The method is illustrated on InP MIS structures w