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Silicon-rich SiO2and thermal SiO2dual dielectric for yield improvement and high capacitance

✍ Scribed by Lai, S.K.-C.; DiMaria, D.J.; Fang, F.F.


Book ID
114594467
Publisher
IEEE
Year
1983
Tongue
English
Weight
477 KB
Volume
30
Category
Article
ISSN
0018-9383

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