Silicon quantum wire array fabrication b
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Canham, L. T.
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Article
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1990
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American Institute of Physics
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English
β 580 KB
Indirect evidence is presented that free-standing Si quantum wires can be fabricated without the use of epitaxial deposition or lithography. The novel approach uses electrochemical and chemical dissolution steps to define networks of isolated wires out of bulk wafers. Mesoporous Si layers of high po