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Realization of silicon quantum wires by selective chemical etching and thermal oxidation

✍ Scribed by J. L. Liu,Y. Shi,F. Wang,Y. Lu,R. Zhang,S. L. Gu,P. Han…

Book ID
118290231
Publisher
Springer
Year
1996
Tongue
English
Weight
413 KB
Volume
63
Category
Article
ISSN
1432-0630

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✍ Canham, L. T. 📂 Article 📅 1990 🏛 American Institute of Physics 🌐 English ⚖ 580 KB

Indirect evidence is presented that free-standing Si quantum wires can be fabricated without the use of epitaxial deposition or lithography. The novel approach uses electrochemical and chemical dissolution steps to define networks of isolated wires out of bulk wafers. Mesoporous Si layers of high po