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Fabrication of precisely controlled silicon wire and cone arrays by electrochemical etching

โœ Scribed by Hong-Seok Seo; Xiaopeng Li; Han-Don Um; Bongyoung Yoo; Jae-Hyun Kim; Kang-Pil Kim; Yong Woo Cho; Jung-Ho Lee

Book ID
113793147
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
390 KB
Volume
63
Category
Article
ISSN
0167-577X

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Silicon quantum wire array fabrication b
Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
โœ Canham, L. T. ๐Ÿ“‚ Article ๐Ÿ“… 1990 ๐Ÿ› American Institute of Physics ๐ŸŒ English โš– 580 KB

Indirect evidence is presented that free-standing Si quantum wires can be fabricated without the use of epitaxial deposition or lithography. The novel approach uses electrochemical and chemical dissolution steps to define networks of isolated wires out of bulk wafers. Mesoporous Si layers of high po