✦ LIBER ✦
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
✍ Scribed by D. Riedel; J.L. Hernandez-Pozos; R.E. Palmer; K.W. Kolasinski
- Book ID
- 106018692
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 265 KB
- Volume
- 78
- Category
- Article
- ISSN
- 1432-0630
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