✦ LIBER ✦

Silicon Oxynitride Layers for Optical Waveguide Applications

✍ Scribed by Germann, R.; Salemink, H. W. M.; Beyeler, R.; Bona, G. L.; Horst, F.; Massarek, I.; Offrein, B. J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Silicon oxynitride planar waveguiding st

✍ de Ridder, R.M.; Warhoff, K.; Driessen, A.; Lambeck, P.V.; Albers, H. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 467 KB

Optical properties of silicon oxynitride

✍ Bossi, Donald E. ;Hammer, Jacob M. ;Shaw, Joseph M. 📂 Article 📅 1987 🏛 The Optical Society 🌐 English ⚖ 695 KB

Fabrication of PECVD-silicon oxynitride-

✍ M.I. Alayo; D. Criado; M.N.P. Carreño; I. Pereyra 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 430 KB

Structural and optical properties of sil

✍ del Giudice, Massimo ;Bruno, Franco ;Cicinelli, Tito ;Valli, Marco 📂 Article 📅 1990 🏛 The Optical Society 🌐 English ⚖ 975 KB

Deposition and characterization of silic

✍ M.I. Alayo; D. Criado; L.C.D. Gonçalves; I. Pereyra 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 262 KB

Optimization of plasma-enhanced chemical

✍ M.G. Hussein; K. Wörhoff; G. Sengo; A. Driessen 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 373 KB