✦ LIBER ✦

Fabrication of PECVD-silicon oxynitride-based optical waveguides

✍ Scribed by M.I. Alayo; D. Criado; M.N.P. Carreño; I. Pereyra

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Design, tolerance analysis, and fabricat

✍ Worhoff, K.; Lambeck, P.V.; Driessen, A. 📂 Article 📅 1999 🏛 Optical Society of America 🌐 English ⚖ 382 KB

Optical properties of silicon oxynitride

✍ Bossi, Donald E. ;Hammer, Jacob M. ;Shaw, Joseph M. 📂 Article 📅 1987 🏛 The Optical Society 🌐 English ⚖ 695 KB

Silicon-based fabrication process for pr

✍ Johnston, I.R.; Parker, G.J. 📂 Article 📅 1996 🏛 The Institution of Electrical Engineers 🌐 English ⚖ 642 KB

Structural and optical properties of sil

✍ del Giudice, Massimo ;Bruno, Franco ;Cicinelli, Tito ;Valli, Marco 📂 Article 📅 1990 🏛 The Optical Society 🌐 English ⚖ 975 KB

Comparative investigation of hydrogen bo

✍ F Ay; A Aydinli 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 544 KB

Characterization of PECVD deposited sili

✍ SP Speakman; PM Read; A Kiermasz 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 543 KB