Design, tolerance analysis, and fabrication of silicon oxynitride based planar optical waveguides for communication devices

✍ Scribed by Worhoff, K.; Lambeck, P.V.; Driessen, A.

• Book ID: 115369678
• Publisher: Optical Society of America
• Year: 1999
• Tongue: English
• Weight: 382 KB
• Volume: 17
• Category: Article
• ISSN: 0733-8724
• DOI: 10.1109/50.779161