✦ LIBER ✦

Structural and optical properties of silicon oxynitride on silicon planar waveguides

✍ Scribed by del Giudice, Massimo ;Bruno, Franco ;Cicinelli, Tito ;Valli, Marco

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical properties of silicon oxynitride

✍ Bossi, Donald E. ;Hammer, Jacob M. ;Shaw, Joseph M. 📂 Article 📅 1987 🏛 The Optical Society 🌐 English ⚖ 695 KB

Silicon oxynitride planar waveguiding st

✍ de Ridder, R.M.; Warhoff, K.; Driessen, A.; Lambeck, P.V.; Albers, H. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 467 KB

Structural and optical properties of amo

✍ Yeh, Jiun‐lin; Lee, Si‐Chen 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 433 KB

Fabrication of PECVD-silicon oxynitride-

✍ M.I. Alayo; D. Criado; M.N.P. Carreño; I. Pereyra 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 430 KB

Influences of silicon nano-crystallized

✍ Wen-Jen Liu; Yin-Chieh Lai; Min-Hang Weng 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 457 KB

Design, tolerance analysis, and fabricat

✍ Worhoff, K.; Lambeck, P.V.; Driessen, A. 📂 Article 📅 1999 🏛 Optical Society of America 🌐 English ⚖ 382 KB