✦ LIBER ✦

Deposition and characterization of silicon oxynitride for integrated optical applications

✍ Scribed by M.I. Alayo; D. Criado; L.C.D. Gonçalves; I. Pereyra

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Integrated optics based on silicon oxyni

✍ D. Peters; K. Fischer; J. Müller 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 540 KB

Optimization of plasma-enhanced chemical

✍ M.G. Hussein; K. Wörhoff; G. Sengo; A. Driessen 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 373 KB

Low-pressure chemical vapor deposition s

✍ Gleine, W. ;Müller, J. 📂 Article 📅 1992 🏛 The Optical Society 🌐 English ⚖ 609 KB

Sputter deposition of silicon oxynitride

✍ Weber, Jörn ;Bartzsch, Hagen ;Frach, Peter 📂 Article 📅 2008 🏛 The Optical Society 🌐 English ⚖ 528 KB

Hydrogenation of silicon nitride and sil

✍ Schalch, D. ;Scharniann, A. ;Wolffut, R. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 258 KB

Characterization of silicon oxynitride m

✍ MD Diatezua; PA Thiry; R Caudano 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 464 KB