Silicon-on-insulator technology for high temperature metal oxide semiconductor devices and circuits
β Scribed by Denis Flandre
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 475 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0921-5107
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π SIMILAR VOLUMES
The motivation to develop high-temperature resistant smart-power products and the impact of silicon-on-insulator (SOI) technology are discussed. The electrical and thermal behaviour of devices on SOI-substrates is illustrated, with examples, showing that smart-power integrated circuits can be design
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