Silicon-on-insulator technology for high
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Jacek Korec
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Article
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1995
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Elsevier Science
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English
β 538 KB
The motivation to develop high-temperature resistant smart-power products and the impact of silicon-on-insulator (SOI) technology are discussed. The electrical and thermal behaviour of devices on SOI-substrates is illustrated, with examples, showing that smart-power integrated circuits can be design