Silicon on Insulator Diode Temperature Sensor– A Detailed Analysis for Ultra-High Temperature Operation

Gas sensors for high temperature operati

Gas sensors for high temperature operation based on metal oxide silicon carbide (MOSiC) devices

✍ A. Arbab; A. Spetz; I. Lundström 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 441 KB

Catalytic metal gate-silicon dioxide-silicon carbide (MOSiC) capacitors operating to about 800 "C are used as high temperature gas sensor devices. Hydrogen or hydrogen containing molecules, which are dissociated on the catalytic metal surface, create a decrease of the flat band voltage of the MOS ca