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Silicon nitride layers of various n-content: Technology, properties and structure

✍ Scribed by Maria Jurzecka-Szymacha; Piotr Boszkowicz; Katarzyna Tkacz-Śmiech

Book ID: 113936996
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 562 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.04.157

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