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Investigation of structure and properties of nanocrystalline silicon on various buffer layers

✍ Scribed by C. Y. Lin; Y. K. Fang; S. F. Chen; C. S. Lin; T. H. Chou; S. B. Hwang; J. S. Hwang; K. I. Lin

Book ID
107453490
Publisher
Springer US
Year
2005
Tongue
English
Weight
368 KB
Volume
34
Category
Article
ISSN
0361-5235

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Silicon nanocrystal superlattices consisting of alternating layers of silicon-rich oxide (SRO) and silica (SiO 2 ) were grown by electron beam evaporation, followed by thermal processing. All of the SRO depositions and the processing steps were done under conditions that were as similar as possible