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Silicon-hydrogen bonds in silicon oxide near the SiO2/Si interface

✍ Scribed by Hiroki Ogawa; Naozumi Terada; Kazuhisa Sugiyama; Kazunori Moriki; Noriyuki Miyata; Takayuki Aoyama; Rinshi Sugino; Takashi Ito; Takeo Hattori

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 221 KB
Volume: 56-58
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(92)90347-z

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