✦ LIBER ✦
Nitrogen saturation behaviour near the SiO2/Si-interface during N2O-rapid thermal oxidation
✍ Scribed by G. Weidner; R. Kurps; K. Blum; D. Krüger
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 354 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.