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Silicide Formation at HfO2/Si and ZrO2/Si Interfaces Induced by Ar+ Ion Bombardment

✍ Scribed by Lebedinskii, Yu.; Zenkevich, A.; Filatov, D.; Antonov, D.; Gushina, J.; Maximov, G.

Book ID: 115527245
Publisher: Cambridge University Press
Year: 2003
Weight: 282 KB
Volume: 786
Category: Article
ISSN: 0272-9172
DOI: 10.1557/proc-786-e3.25

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