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Silicidation process of Ti/TiNx/Si structures

✍ Scribed by Pérez-Rigueiro, J.; Jiménez, C.; Pérez-Casero, R.; Martı́nez-Duart, J. M.

Book ID
120390247
Publisher
American Institute of Physics
Year
1997
Tongue
English
Weight
358 KB
Volume
81
Category
Article
ISSN
0021-8979

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First stages of silicidation in Ti/Si th
First stages of silicidation in Ti/Si thin films
✍ B Chenevier; O Chaix-Pluchery; P Gergaud; O Thomas; R Madar; F La Via 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 186 KB

The structural evolution in fiber-textured Ti / Si thin films was investigated by in-situ X-ray diffraction in the temperature range preceding the formation of silicide compounds. Abnormal thermal behaviour of both 002 and 101 diffraction profiles was observed at 360 and 450 8C, which could be under