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Silane formation on silicon: reaction kinetics and surface analysis

✍ Scribed by Frank, Timothy C.; Falconer, John L.

Book ID: 119966901
Publisher: American Chemical Society
Year: 1985
Tongue: English
Weight: 896 KB
Volume: 1
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la00061a017

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