✦ LIBER ✦

SiGe Sputter Epitaxy Technique and Its Application to SiGe Devices

✍ Scribed by Yoshiyuki Suda; Hiroaki Hanafusa; Mitsuhiro Yoshikawa; Manabu Kanazawa

Book ID: 118492778
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 504 KB
Volume: 36
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.03.058

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