✦ LIBER ✦
A new technique to fabricate ultra-shallow-junctions, combining in situ vapour HCl etching and in situ doped epitaxial SiGe re-growth
✍ Scribed by Roger Loo; Matty Caymax; Philippe Meunier-Beillard; Ivan Peytier; Frank Holsteyns; Stefan Kubicek; Peter Verheyen; Richard Lindsay; Olivier Richard
- Book ID
- 103815709
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 187 KB
- Volume
- 224
- Category
- Article
- ISSN
- 0169-4332
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