## ลฝ . Dissociative adsorption of monomethylsilane MMS , a promising precursor gas for low-temperature SiC, has been ลฝ . ลฝ . investigated on Si 100 by using temperature-programmed desorption TPD method after its comparison with Hr and ลฝ . ลฝ . C H rSi 100 surfaces. For both MMSr and C H rSi 100 ,
โฆ LIBER โฆ
Si2H6 adsorption and hydrogen desorption on Si(100) investigated by infrared spectroscopy
โ Scribed by Michio Niwano; Masanori Shinohara; Yoichiro Neo; Kuniyoshi Yokoo
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 218 KB
- Volume
- 162-163
- Category
- Article
- ISSN
- 0169-4332
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