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Isothermal H2 desorption kinetics from Si(100) 2 × 1: dependence on disilane and atomic hydrogen precursors

✍ Scribed by L.A. Okada; M.L. Wise; S.M. George

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 623 KB
Volume: 82-83
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90250-x

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