Optical second-harmonic investigations of H2 and D2 adsorption on Si (100) 2 × 1: the surface temperature dependence of the sticking coefficient

✍ Scribed by P. Bratu; K.L. Kompa; U. Höfer

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 715 KB
• Volume: 251
• Category: Article
• ISSN: 0009-2614
• DOI: 10.1016/0009-2614(96)00085-1

✦ Synopsis

Optical second-harmonic generation has been used to determine the sticking probability for dissociative adsorption of HZ and D2 on Si( 100)2x 1 as a function of surface temperature. The initial sticking coefficient increases from 10e8 at 550 K to 10e5 at 1OOOK. It shows an activated behaviour as a function of the surface temperature with an activation energy of 0.70 f 0.1 eV for Hz and 0.75 f 0.1 eV for Dz. The results demonstrate that lattice distortions play a significantly stronger role in the adsorption process than would be expected solely from the tilting of Si-Si dimers.