Si1-x-yGexCy growth and properties of the ternary system
โ Scribed by A.R. Powell; K. Eberl; B.A. Ek; S.S. Iyer
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 373 KB
- Volume
- 127
- Category
- Article
- ISSN
- 0022-0248
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๐ SIMILAR VOLUMES
The local atomic structure and lattice dynamics are studied for strain-compensated \(\mathrm{Si}_{1-\mathrm{x}-\mathrm{y}} \mathrm{Ge}_{\mathrm{x}} \mathrm{C}_{\mathrm{y}}\) layers grown by molecular beam epitaxy on \(\mathrm{Si}\) (001) substrates. The layers were characterized by transmission elec
## Abstract The previously published โthreeโpartial ratesโ model of Si~1โ__x__~Ge~__x__~ layer growth (Kรผhne 1992) has been extended for describing Si~1โ(__x__+__y__)~Ge~__x__~B~__y__~ ternary systems by taking additionally into account a partial rate of boron and a partial rate of boronโoriginated