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Sheath formation and ion flux distribution inside the trench in plasma-based ion implantation

โœ Scribed by T. Ikehata; K. Shioya; T. Araki; N.Y. Sato; H. Mase; K. Yukimura


Book ID
114167177
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
212 KB
Volume
206
Category
Article
ISSN
0168-583X

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