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Sheath and potential characteristics in rf magnetron sputtering plasma

โœ Scribed by Kakati, H.; Pal, A. R.; Bailung, H.; Chutia, Joyanti


Book ID
120424218
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
354 KB
Volume
100
Category
Article
ISSN
0021-8979

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