Substrate floating potential characteristics in planar magnetron and ht sputtering systems

✍ Scribed by L Holland; G Samuel

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 672 KB
• Volume: 30
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(80)80038-8