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Shape and Functional Elements of the Bulk Silicon Microtechnique || General Overview of the Shape- and Functional Elements and the Procedure of their Design

✍ Scribed by ,

Book ID
120531812
Publisher
Springer-Verlag
Year
2005
Tongue
German
Weight
82 KB
Edition
2005
Category
Article
ISBN-13
9783540221098

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✦ Synopsis

this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use Of The Relevant Techniques And An Extensive Collection Of Examples For The Support Of The Search For Applications Via Photographs, Drawings And References. It Serves As A Valuable Guide To The Design Of Etch Masks And Processes While Summarizing The Important Properties Of Silicon, Especially Aiming At Producers Of Sensors And Microtechnical Components, As Well As Producers Of Components Of Precision Engineering And Optical Applications.

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