this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use
Shape and Functional Elements of the Bulk Silicon Microtechnique || Elements for Optical Applications
β Scribed by ,
- Book ID
- 120532433
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- German
- Weight
- 660 KB
- Edition
- 2005
- Category
- Article
- ISBN-13
- 9783540221098
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β¦ Synopsis
this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use Of The Relevant Techniques And An Extensive Collection Of Examples For The Support Of The Search For Applications Via Photographs, Drawings And References. It Serves As A Valuable Guide To The Design Of Etch Masks And Processes While Summarizing The Important Properties Of Silicon, Especially Aiming At Producers Of Sensors And Microtechnical Components, As Well As Producers Of Components Of Precision Engineering And Optical Applications.
π SIMILAR VOLUMES
this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use
this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use
This paper introduces a general theory for the derivation of the shape functions for the quadrilateral family of finite elements. The first section deals with the Lagrangian shape functions for the cases of uniform and boundary-described elements. Two basic procedures are introduced; the first by li