𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Shape and functional elements of the bulk silicon microtechnique: a manual of wet-etched silicon structures

✍ Scribed by Joachim Frühauf

Book ID
127461031
Publisher
Springer
Year
2004
Tongue
English
Weight
9 MB
Edition
1
Category
Library
City
Berlin ; New York
ISBN-13
9783540221098

No coin nor oath required. For personal study only.

✦ Synopsis

This manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. A systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications is given. It includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. Especially written for producers of sensors and microtechnical components. it serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon.

✦ Subjects

Материаловедение в приборостроении

📜 SIMILAR VOLUMES

Shape and Functional Elements of the Bul
Shape and Functional Elements of the Bulk Silicon Microtechnique || Technological Basis of Bulk-Silicon-Microtechnique
✍ , 📂 Article 📅 2005 🏛 Springer-Verlag 🌐 German ⚖ 249 KB

this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use

Shape and Functional Elements of the Bul
Shape and Functional Elements of the Bulk Silicon Microtechnique || Introduction
✍ , 📂 Article 📅 2005 🏛 Springer-Verlag 🌐 German ⚖ 56 KB

this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use

Shape and Functional Elements of the Bul
Shape and Functional Elements of the Bulk Silicon Microtechnique || Elements for Optical Applications
✍ , 📂 Article 📅 2005 🏛 Springer-Verlag 🌐 German ⚖ 660 KB

this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use

Shape and Functional Elements of the Bul
Shape and Functional Elements of the Bulk Silicon Microtechnique || General Overview of the Shape- and Functional Elements and the Procedure of their Design
✍ , 📂 Article 📅 2005 🏛 Springer-Verlag 🌐 German ⚖ 82 KB

this Methodic Manual Presents A Survey Of The Form-related And Functional Elements Of The Bulk Silicon Microtechnique. It Gives A Systematic Description Of Simple Shape Elements And Of Elements For Mechanical, Fluidic And Optical Applications. This Manual Includes Practical Instructions For The Use