✦ LIBER ✦
Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes
✍ Scribed by Prem Pal; Kazuo Sato
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 790 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
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