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Shallow boron implantations in Ge and the role of the pre-amorphization depth

โœ Scribed by E. Simoen; G. Brouwers; A. Satta; M.-L. David; F. Pailloux; B. Parmentier; T. Clarysse; J. Goossens; W. Vandervorst; M. Meuris


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
445 KB
Volume
11
Category
Article
ISSN
1369-8001

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