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Sensor application of SiON integrated optical waveguides on silicon

✍ Scribed by K. Fischer; J. Müller

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
516 KB
Volume
9
Category
Article
ISSN
0925-4005

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## Abstract Surface plasmon resonance (SPR) sensors made by multimode silica‐on‐silicon channel waveguides are investigated theoretically and experimentally. Promising sensing characteristics, with sensitivity up to 4547 nm/RIU, are observed over a wide detection range without a conventional tuning