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RBS and ERD characterization of SiON films for optical waveguide applications

✍ Scribed by A. Climent-Font; F. Pászti; A. Muñoz-Martín; E. Ruiz; J. Garrido; P.L. Pernas

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 189 KB
Volume: 240
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.06.142

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