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Surface plasmon resonance sensors using silica-on-silicon optical waveguides

✍ Scribed by Yi-Shin Chu; Wen-Hao Hsu; Chii-Wann Lin; Way-Seen Wang

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
152 KB
Volume
48
Category
Article
ISSN
0895-2477

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✦ Synopsis

Abstract

Surface plasmon resonance (SPR) sensors made by multimode silica‐on‐silicon channel waveguides are investigated theoretically and experimentally. Promising sensing characteristics, with sensitivity up to 4547 nm/RIU, are observed over a wide detection range without a conventional tuning‐layer design. The Si‐based device‐fabrication process offers great potential for high‐level sensor integration. Β© 2006 Wiley Periodicals, Inc. Microwave Opt Technol Lett 48: 955–957, 2006; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21531

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