✦ LIBER ✦

Semiconductor wafer bonding

✍ Scribed by Dr. V. Lehmann; Dr. I. W. K. Ong; Prof. U. Gösele; Dr. R. Stengl; Dr. K. Mitani

Book ID: 101411530
Publisher: John Wiley and Sons
Year: 1990
Tongue: English
Weight: 297 KB
Volume: 2
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.19900020809

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