Semiconductor wafer bonding
β
Reiche, M.
π
Article
π
2006
π
John Wiley and Sons
π
English
β 648 KB
## Abstract When mirrorβpolished, flat, and clean wafers are brought into contact, they are locally attracted to each other and adhere or bond. This phenomenon is known as semiconductor wafer bonding. Different adhesion forces (van der Waals forces, hydrogen bonding) are the reason for the bonding