The use of a semiconductor pressure sensor based on AlGaAs thin films to measure shock-wave pressures in lithotripters is described. The selection of an optimal thickness of encapsulant on the face of the pressure-sensitive chip enables a satisfactory durability and dynamic accuracy of the sensors t
Semiconductor string pressure sensor
β Scribed by N. Bogdanova; R. Baizar; V. Voronin; E. Krasnogenov
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 368 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0924-4247
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