Semiconductor pressure-pulse sensor

✍ Scribed by V. Stankevič; Č. Šimkevičius

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 365 KB
• Volume: 51
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(95)01210-9

✦ Synopsis

The use of a semiconductor pressure sensor based on AlGaAs thin films to measure shock-wave pressures in lithotripters is described. The selection of an optimal thickness of encapsulant on the face of the pressure-sensitive chip enables a satisfactory durability and dynamic accuracy of the sensors to be obtained. Pressure sensors with a diameter of (1.3 \mathrm{~mm}) have a sensitivity of (1.5 \mathrm{mV} \mathrm{MPa}{ }^{-1}), a durability of about (2 \times 10^{4}) pressure pulses of (40 \mathrm{MPa}) in amplitude and a rise time less than (0.1 \mu \mathrm{s}). The advantages and disadvantages of the proposed sensor as compared to pressure-pulse sensors of other types are discussed.