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Development of pulse-drive semiconductor gas sensor

โœ Scribed by T. Amamoto; T. Yamaguch; Y. Matsuura; Y. Kajiyama

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
154 KB
Volume
14
Category
Article
ISSN
0925-4005

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โœ T. Nomura; T. Amamoto; Y. Matsuura; Y. Kajiyama ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 287 KB

To improve the sensitivity to fluorocarbon, surface-modification effects on fluorocarbon detection of a gas sensor based on metal oxides such as SnO,, ZnO, In,O,, Fe,O, and WO, have been examined. It is proved that SnOz is the most suitable material for fluorocarbon detection. 39 kinds of elements h