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Self-sputtering of silver using polyatomic projectiles

✍ Scribed by R Heinrich; A Wucher


Book ID
114166014
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
216 KB
Volume
193
Category
Article
ISSN
0168-583X

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Electromigration resistance of sputtered
✍ M Hauder; W Hansch; J GstΓΆttner; D Schmitt-Landsiedel πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 729 KB

Electromigration was investigated for sputtered Ag lines patterned by wet etching or by a novel hybrid etching technique. This new patterning technique works in two steps. After employing an oxygen plasma in the first step, a hydrogen peroxide solution is used in the second step. This technique show